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Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 133 Vacuum evaporation Simulation of distribution of film thickness (1) On rotating substrate (2) Comparison with theoretical values (3) Comparison with experiments regarding dependency of Argon gas pressure bill 文本框 上海锦科信息科技有限公司 专业软件和技术开发服务提供商 www.btitgroup.com info@btitgroup.com Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 134 (1) Model xx yy zz Substrate R=100R=100 Evaporation source : Φ=0.2 [[cm]cm] Absorbed wallAbsorbed wall 9090 100100 Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 135 (1) Comparison of particle fluxes Stationary substrate Max. ：0.1245×1020 Min. ：0.0075×1020 Rotating substrate Max.：0.4276×1019 Min. ：0.3802×1019 Unit:[/mUnit:[/m2/s]/s] Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 136 Substrate Flow out Evaporation source 1) Point 2) Surface（5mm square） [cm] Material：Ａｌ Temperature：1000 [K] Flux： 1.8×1017 [#/cm2/s] (2) Model Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 137 (2) Distribution of film thickness Point source Substrate θ A dω O r0 θ r Φ Small surface source cos3θ cos4θ (Φ=θ) Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 138 (2) Distribution of particle flux and pressure Point source Small surface source Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 139 (2) Distribution of particle flux θ 膜 厚 分 布 膜 厚 分 布 AngleAngle pointpoint small surfacesmall surface Fi lm th ic kn es s Fi lm th ic kn es s Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 140 (3) Equipment/Model Experiment by Associate Prof. M. Nakamura Faculty of engineering Chiba Univ. MassMass ：：197amu197amu DiameterDiameter ：：174pm ( 1.74174pm ( 1.74ÅÅ)) TemperatureTemperature：：14001400℃℃ (1673 [K] )(1673 [K] ) FluxFlux ：：0.874mg/sec (2.6565 X100.874mg/sec (2.6565 X101818 [#/sec] )[#/sec] ) Blue colored wallBlue colored wall isis partition wallpartition wall SubstrateSubstrateSurfaceSurface evaporation sourceevaporation source EnlargementEnlargement Center lineCenter line Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 141 11.15 C B A A = 1.7 B = 0.7 C = 0.85 Unit：ｃｍ 24 12 1212 Symmetric boundary X Z Y Half model in Y-direction Evaporation surface Substrate 13 7.5 8 (3) Model Absorbed wall except symmetric and inflow boundary PartitionPartition wallwall Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 142 11.15 Unit：ｃｍ 24 12 1212 X Z Y Substrate 2.05 X Observed point (3) Observed point of film thickness 24 Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 143 (3)Comparison with simulation and experiment of film thickness RGS3D Ar gas pressure dependencyAr gas pressure dependency N or m al ize d by m ax im um va lu e N or m al ize d by m ax im um va lu e Ar gas pressure [Pa]Ar gas pressure [Pa] Exp.Exp. In this simulation,In this simulation, gas flow of Ar is neglected.gas flow of Ar is neglected. So there are slightly differences.So there are slightly differences. Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 144 (3)Distribution of speed of incident particles to substrate Speed of incident particles [m/s]Speed of incident particles [m/s] Frequency distribution of speedFrequency distribution of speed Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 145 (3)Spatial distribution of density,pressure, etc. DensityDensity TemperatureTemperature PressurePressure Particle flux and VelocityParticle flux and Velocity Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 146 Emission coeff. and emitted angular dist.Emission coeff. and emitted angular dist. Emitted angular dist.Emitted angular dist. Emitted angular dist.Emitted angular dist. Emitted angleEmitted angle Emitted angleEmitted angle Pr ob ab ili ty Pr ob ab ili ty Pr ob ab ili ty (N or m al iz ed ) Pr ob ab ili ty (N or m al iz ed ) Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 147 Emission coeff. And speed dist.Emission coeff. And speed dist.（（Al 1000[K]Al 1000[K]）） Speed distributionSpeed distribution Speed distributionSpeed distribution Pr ob ab ili ty Pr ob ab ili ty Pr ob ab ili ty (N or m al iz ed ) Pr ob ab ili ty (N or m al iz ed ) Speed [m/s]Speed [m/s] Speed [m/s]Speed [m/s] Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 148 Substrate Domain ：100mm cubic Evaporation source ：47.5