International Journal of Bifurcation and Chaos, Vol. 7, No. 10 (1997) 2199{2218
Visions of Nonlinear Science: Festschrift dedicated to Leon O. Chua
c© World Scienti�c Publishing Company
QUANTUM-DOT DEVICES AND
QUANTUM-DOT CELLULAR AUTOMATA
WOLFGANG POROD
Department of Electrical Engineering,
University of Notre Dame,
Notre Dame, IN 46556, USA
Received June 26, 1996; Revised February 16, 1997
We discuss novel nanoelectronic architecture paradigms based on cells composed of coupled
quantum-dots. Boolean logic functions may be implemented in speci�c arrays of cells repre-
senting binary information, the so-called Quantum-Dot Cellular Automata (QCA). Cells may
also be viewed as carrying analog information and we outline a network-theoretic description of
such Quantum-Dot Nonlinear Networks (Q-CNN). In addition, we discuss possible realizations
of these structures in a variety of semiconductor systems (including GaAs/AlGaAs, Si/SiGe,
and Si/ SiO2), rings of metallic tunnel junctions, and candidates for molecular implementations.
1. Introduction
Since its inception a few decades ago, silicon ULSI
technology has experienced an exponential improve-
ment in virtually any �gure of merit. However,
there are indications now that this progress will
slow, or even come to a standstill, as technologi-
cal and fundamental limits are being reached. This
slow-down of conventional silicon technology may
provide an opportunity for alternative device tech-
nologies. In this paper, we will describe some ideas
of the Notre Dame NanoDevices Group on a pos-
sible future nanoelectronic computing technology
based on cells of coupled quantum dots.
Up until today, silicon technology has closely
followed a famous dictum made in 1965 by Intel
Corporation chairman Gordon Moore. In those
early days of the integrated circuit, he had pro-
jected the expected progress for the next decade,
anticipating that the number of transistors on a
chip and their performance would double every 18
months, or so. Now, three decades later, this pre-
diction has turned out to be remarkably accurate
over the whole duration. Figure 1 gives a schematic
version of this so-called Moore’s Law, the solid line
showing the exponential reduction in the minimum
feature size over the past 30 years. For how long
will this trend continue?
In recent years, the Semiconductor Industry
Association has studied this question and issued a
blueprint for future development which has become
known as the SIA Roadmap [1994]. Basically, the
Roadmap predicts a continuation of Moore’s Law
early into the next century. However, there is an
increasing indication that these improvements will
not continue when we enter the deep submicron or
nanometric regime. Both technological and funda-
mental limitations will be responsible for the an-
ticipated slow-down and eventual standstill. It is
expected that by the year 2010, minimum feature
sizes will be on the order of 0.07 micrometer, or
70 nanometer (103 nm = 1 �m = 10−6 m).
Among the chief technological limitations re-
sponsible for this expected slow-down are the in-
terconnect problem and power dissipation [Keyes,
1987; Ferry et al., 1987, 1988]. As more and more
devices are packed into the same area, the heat gen-
erated during a switching cycle can no longer be
removed, and the chip literally begins to melt. In-
terconnections do not scale in concert with device
scaling because of the e�ect of wire resistance and
capacitance, giving rise to a wiring bottleneck. It is
2199
2200 W. Porod
Fig. 1. Schematic version of Moore’s Law showing the exponential reduction in the minimum feature size for the past three
decades (solid line) and its extrapolation into the next century (dashed line).
generally recognized that alternate approaches are
needed to create innovative technologies that pro-
vide greater device and interconnect functionality
per lithography feature, thus lessening the depen-
dence on simple scaling, or to utilize innovative cir-
cuit and system architectural features that provide
more function per transistor.
Fundamental limits arise as device dimensions
shrink due to changes in device performance dic-
tated by the laws of physics. These phenomena in-
clude a loss of gate control and quantum mechanical
e�ects as devices enter the nanometer regime. Cur-
rent CMOS technology is based on devices which
basically act as voltage-controlled current switches.
In the deep submicron regime, the required gate
control will no longer be possible because of short-
channel e�ects due to electrostatics. Device opera-
tion will also be altered due to the emerging quan-
tum mechanical nature of the electrons, thus giving
rise to novel physical e�ects.
Because of the above reasons, expectations are
that potential show-stoppers await conventional sil-
icon ULSI as it approaches the nanometer regime.
Scaled-down transistors interconnected in conven-
tional circuit architectures will no longer function as
required and the fabrication will pose insurmount-
able problems. However, these obstacles for silicon
circuitry may present an opportunity for alterna-
tive device technologies which are designed for the
nano-regime and which are interconnected in an ap-
propriate architecture. This is the main \vision" of
this paper.
In this paper, we describe our ideas of us-
ing nanostructures (more speci�cally, quantum
dots) which are arranged in locally-interconnected
cellular-automata-like arrays. We will demonstrate
that suitably constructed structures may be used
for computation and signal processing. Our pro-
posal is called \Quantum-Dot Cellular Automata"
(QCA) [Lent et al., 1993]. Note that our proposal is
not a quantum computer in the sense of the \quan-
tum computing" community, as reviewed by Spiller
[1996]. QCA’s do not require quantum mechan-
ical phase coherence over the entire array; phase
coherence is only required inside each cell and the
cell{cell interactions are classical. This limited re-
quirement of quantum mechanical phase coherence
makes QCA’s a more attractive candidate for actual
implementations.
Our work is based on the highly advanced
state-of-the-art in the �eld of nanostructures and
the emerging technology of quantum-dot fabri-
cation [Weisbuch & Vinter, 1991; Kelly, 1995;
Turton, 1995; Montemerlo et al., 1996]. As
Fig. 2. Schematic diagram of arti�cial \quantum-dot
atoms" and \quantum-dot molecules" which are occupied by
few electrons.
Quantum-Dot Devices and Quantum-Dot Cellular Automata 2201
schematically shown in Fig. 2, several groups
have demonstrated that electrons may be com-
pletely con�ned in semi-conductor nanostructures,
which may then be thought of as arti�cial \semi-
conductor atoms". Controllable occupation of
these quantum dots has been achieved in the few-
electron regime. One may speak of \quantum-dot
hydrogen", \quantum-dot helium", \quantum-dot
lithium", etc. [Kastner, 1993; Ashoori, 1996]. Very
recently, coupling between quantum-dot atoms in
close proximity has been observed, thus realizing
arti�cial \quantum-dot molecules".
In order to observe quantization phenomena,
extremely pure material is needed and the experi-
ments have to be done at very low temperatures us-
ing cryogenic techniques [Weisbuch & Vinter, 1991].
The reason for this is that quantum-mechanical co-
herence is destroyed by scattering due to both im-
purities (thus the requirement of highly pure ma-
terial) and lattice vibrations (thus the requirement
of low temperature). While low temperatures are
not desirable for purposes of applications, they re-
flect the current technological limitation in the fab-
rication of nano-meter-size structures [Kelly, 1995].
Any decrease in the feature sizes will result in less
stringent requirements for purity and low tempera-
ture. Control on the molecular level, i.e. molecular
electronics implementations, would make possible
room temperature operation.
We are led to consider quantum dots for device
applications. This will entail a need for new circuit
architecture ideas for these new devices. The nano-
structures we envision will contain only few elec-
trons available for conduction. It is hard to imagine
how devices based on nanostructures could func-
tion in conventional circuits, primarily due to the
problems associated with charging the interconnect
wiring with the few electrons available. Therefore,
we propose to envision a nanoelectronic architecture
where the information is contained in the arrange-
ment of charges and not in the flow of charges (i.e.
current). In other words, the devices interact by di-
rect Coulomb coupling and not by currents through
wires. We envision to utilize the existing physical
interactions between neighboring devices in order to
directly produce the dynamics, such that the logical
operation of each cell would require no additional
connections beyond the physical coupling within a
certain range of interactions. We are led to consider
cellular-automata-like device architectures of cells
communicating with each other by their Coulombic
interaction.
Figure 3 schematically shows a locally-
interconnected array consisting of cells of nano-
electronic devices. The physical interactions to-
gether with the array topology determine the
overall functionality. \What form must a cellular
array take when its dynamics should result directly
from known physical interactions?". If we simply
arrange nanometer-scale devices in a dense cellular
array, the device cells may interact, but we have
given up all control over which cell interacts with
which neighbor and when they interact. In general,
the state of a cell will depend on the state of its
neighbors within a certain range. The main ques-
tions now are: \What functionality does one obtain
for a given physical structure?" and \Given a cer-
tain array behavior, is there a physical system to
implement it?".
This problem of a desired mapping between lo-
cal connection rules and overall array behavior is
an old one, and known to be di�cult. No general
principles exist which would allow one to extrapo-
late \interesting" array dynamics from a given set
of interactions. A two-pronged approach suggests
itself to tackle this problem: In the \top down ap-
proach" the functionality of the array is �rst speci-
�ed, and then one faces the problem of realizing the
required local connectivities. On the other hand, in
a \bottom up approach" the physical pattern of in-
terconnections is given, and one then attempts to
infer possible overall behavior of the array.
Computation in physics-like cellular spaces has
been studied over the years. Konrad Zuse, a Ger-
man computer pioneer, investigated the behavior of
discrete-space and discrete-time systems, which he
termed \Rechnender Raum" (translated as \Com-
puting Space") [Zuse, 1969]. He showed that a
binary space (two states per cell) with an appro-
priate dynamical law support the propagation of
Fig. 3. Schematic picture of a cellular array where the in-
terconnections are given by physical law. The underlying
physics determines the overall functionality of the array.
2202 W. Porod
elementary patterns, which he called \Digital-
Teilchen" (\Digital Particle"). The idea that \dis-
crete" cellular spaces might provide an alternative
to \continuous" classical physics has been discussed
by To�oli and Margolus [1987]. Frisch, Hasslacher,
and Pomeau [1986] showed that deterministic lat-
tice gases with discrete Boolean elements are able
to simulate the Navier{Stokes equation. Biafore
has proposed so-called replica cellular automata for
nanometer scale computation [1994]. We have stud-
ied this relationship between local connectivity pat-
terns with overall array behavior, using the dis-
cretized Helmholtz equation as a computational
model [Porod, Harbury & Lent, 1996]. Using con-
tinuous cell states, one obtains wave phenomena like
Huygen’s principle, di�raction, and interference.
For discrete cell states, the resulting switching rules
are very similar to the ones used by Konrad Zuse in
his pioneering work on discrete spacetime models of
computation.
In the following chapters we will develop these
ideas in detail and we will present a concrete ex-
ample of a quantum-dot cell with an appropriate
architecture, the so-called Quantum-Dot Cellular
Automata. We will discuss how one may construct
QCA cells that encode binary information and how
one can thus realize Boolean logic functions. We
will also discuss how one may view these arrays
as quantum-dot cellular neural (or, nonlinear) net-
works Q-CNN’s. A key question, of course, are im-
plementations. We will discuss ideas (and on-going
work) on attempting to implement these struc-
tures in a variety of semiconductor systems (includ-
ing GaAs/AlGaAs, Si/SiGe, and Si/SiO2) and also
metallic dots. Alternative implementations include
molecular structures. We will call attention to a
speci�c molecule which appears to be particularly
promising since it possesses a structure similar to
a QCA cell. One of the most promising material
systems appears to be Si/SiO2, mostly due to the
excellent insulating properties of the oxide. Note
that our search for a technology beyond silicon may
bring us back to silicon!
Exciting as the vision of a possible nanoelec-
tronics technology may be, many fundamental and
technological challenges remain to be overcome. We
should keep in mind that this exploration has just
begun and that other promising designs remain yet
to be discovered. This exciting journey will require
the combined e�orts of technologists, device physi-
cists, circuit-and-systems theorists, and computer
architects.
2. Introduction to Nanoelectronic
Structures
Here we attempt to provide a state-of-the-art survey
of nanofabrication, i.e. the realization of electronic
devices on the nanometer scale. In this regime,
quantum mechanical e�ects become visible and may
be exploited for device functionality [Capasso,
1990]. In these small structures, device performance
is determined by only a few electrons, and in the
limit by only a single electron per device [Grabert &
Devoret, 1992]. Our focus in particular will be
on a review of quantum-dot fabrication techniques
for the design and realization of arti�cial semicon-
ductor quantum-dot atoms and molecules [Kastner,
1993; Ashoori, 1996].
2.1. Low-dimensional semiconductor
structures
Advanced semiconductor growth techniques, such
as molecular beam epitaxy (MBE), allow the fab-
rication of semiconductor sandwich structures with
interfaces of virtually atomic precision. This con-
trol in the growth direction allows one to realize ar-
ti�cial layered crystals with desired electronic and
optical properties, as �rst suggested by Esaki and
Tsu [1970]. A schematic picture of such a sandwich
structure is shown in Fig. 4. The various layers can
be made to posses di�erent properties by choos-
ing an appropriate material during growth. One
of the main uses of this technique is to utilize the
di�erence in bandgap between materials in the var-
ious layers. This di�erence in the band gap results
in an e�ective electronic potential energy which
Fig. 4. Schematic diagram of a semiconductor sandwich
structure with a \quantum well" layer resulting in a quasi
two-dimensional electronic system.
Quantum-Dot Devices and Quantum-Dot Cellular Automata 2203
Fig. 5. Schematic diagram of etched lines resulting in
\quantum wires" and etched pillars resulting in \quantum
dots".
electrons experience, as schematically shown in the
�gure. This technique is referred to as bandgap en-
gineering and has been used extensively to taylor
device structures [Capasso, 1990]. The layers can
be grown su�ciently thin such that the quantum
mechanical con�nement e�ect becomes important.
Also shown in the �gure below are the resulting
quantized energy states in the quantum well struc-
ture. This leads to the formation of a quasi two-
dimensional electronic system in the quantum well
layer (2DEG).
Control in the lateral direction can be achieved
by conventional patterning techniques such as
optical or electron-beam lithography. Subsequent
processing steps, e.g. etching, can then selectively
remove material to de�ne lines or dot patterns,
as schematically shown in Fig. 5. This process-
ing results in further con�nement of the 2DEG into
quasi one-dimensional systems (so-called quantum
wires) or even quasi zero-dimensional systems (so-
called quantum dots) [Reed et al., 1988; Meurer
et al., 1992].
A di�erent approach of further constricting
a 2DEG is to use electrostatic con�nement. As
schematically shown in Fig. 6, one may use lat-
eral patterning techniques to shape a metallic layer
which has been deposited onto the top surface
of the MBE-grown semiconductor sandwich struc-
ture. Applying a negative bias to the gates will
deplete the 2DEG underneath the metallic elec-
trodes. In this fashion, one may create quantum
wires by using two gates as schematically shown.
In the literature, this technique is referred to as
split-gate design [Thornton et al., 1986]. Using a
Fig. 6. Schematic diagram of further shaping a 2DEG into
\quantum wires" and \quantum dots" by using electrostatic
con�nement provided by patterned metallic electrodes.
variety of gate structures, one may realize elec-
tronic systems of arbitrary shape. In particular,
one may use gates to create \puddles" of electrons,
thus realizing quantum dots [Meirav et al., 1990].
In recent years, there have been a variety of exper-
iments on such gate-con�ned quantum dots, and it
has been demonstrated that the dot size, and thus
also its occupation, can be adjusted by appropri-
ately varying the bias voltages on the top gates
[Ho�mann et al., 1995; Waugh et al., 1995; Blick
et al., 1996].
The techniques described so far utilize process-
ing steps which are also used in conventional IC
fabrication. In addition, more exotic nanostructure
fabrication techniques are under study and develop-
ment, which include the use of scanning tunneling
microscope (STM) tips and chemical self-assembly.
Nanolithography using an atomic force micro-
scope (AFM) is also possible. The atomically-sharp
AFM tip may be used to either directly pattern the
surface by scratching [Wendel et al., 1996], or it
may be used to induce local chemical or physical
reaction thus modifying the surface [Lyding et al.,
1994]. AFM nanometer scale lithography has been
described on various materials and structures, in-
cluding processing at ambient conditions. The gen-
erated patterns can then be transferred to the two-
dimensional electron gas by wet chemical etching or
ion-beam irradiation.
Chemical self-assembly techniques may also
be used to create nanostructure. Using special
growth conditions, several groups have demon-
strated that very thin semiconductor layers sponta-
neously assemble into tiny droplets, which exhibit
quantum-con�nement e�ects [Leonard et al., 1993;
Kirstaedter et al., 1994; Temmyo et al., 1995]. Elas-
tic strain appears to play a critical role. While this
2204 W. Porod
technique yields rather small dots (with sizes on
the order of 10 nm, or so), the exact placement of
these dots is still a problem, but progress is being
made.
3. Quantum-Dot Cellular Automata
Based upon the emerging technology of quantum-
dot fabrication, the Notre Dame NanoDevices
group has proposed a scheme for computing with
cells of coupled quantum dots [Lent et al., 1993],
which will be described below. To our knowledge,
this is the �rst concrete proposal to utilize quantum
dots for computing. There had been earlier sugges-
tions that device{device coupling might be utilized
in a cellular-automata scheme, but alas, these were
without an accompanying proposal for a speci�c im-
plementation [Ferry & Porod, 1986; Grondin et al.,
1987].
What we have in mind is the general architec-
ture shown in Fig. 7. The coupling between the
cells is given by their physical interaction, and not
by wires. The physical mechanisms available for