四探针测试仪测量薄膜的电阻率(2012)

四探针测试仪测量薄膜的电阻率(2012) 四探针测试仪测量薄膜的电阻率 一、 实验目的 1、掌握四探针法测量电阻率和薄层电阻的原理及测量; 2、了解影响电阻率测量的各种因素及改进措施。 二、实验仪器 采用SDY-5型双电测四探针测试仪(含:直流数字电压表、恒流源、电源、DC-DC电源变换器)。 三、实验原理 电阻率的测量是半导体材料常规参数测量项目之一。测量电阻率的方法很多，如三探针法、电容---电压法、扩展电阻法等。四探针法则是一种广泛采用的方法，在半导体工艺中最为常用。 1、半导体材料体电阻率测量原理 在半无穷大样品上的点电流源， 若样品的电阻率ρ均匀， 引入点电流源的探针其电流强度为I，则所产生的电场具有球面的对称性， 即等位面为一系列以点电流为中心的半球面，如图1所示。在以,为半径的半球面上，电流密度,的分布是均匀的: 若E为,处的电场强度， 则: 图1 点电流源电场分布 由电场强度和电位梯度以及球面对称关系， 则: ,I,d,d,,Edr,,dr,,E2 2,rdr 取,为无穷远处的电位为零， 则: ,(rrr),dr,,,dEdr,,, ,,,2,,02,r ,l,(r), (1) 2r,图2 任意位置的四探针 school)], 4 4 house building as well as more than 1000 copies of books, more than 10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Government established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at night, Yao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the kaiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang Jia溇 Zhou Dana (male) weeks because of long-term illness and can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife at the scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to "mop-up" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in the end. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, killing 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is a Japanese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand or six thousand, water and land go hand in hand "mop-up" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (County Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notification 上式就是半无穷大均匀样品上离开点电流源距离为,的点的电位与探针流过的电流和样品电阻率的关系式，它代表了一个点电流源对距离,处的点的电势的贡献。 对图2所示的情形，四根探针位于样品中央，电流从探针1流入，从探针4流出， 则可将1和4探针认为是点电流源，由1式可知，2和3探针的电位为: ,,I1111I, ,,(),(),,32,rr22,rr13341224 2、3探针的电位差为: ,I1111,,V,,,,,，()2323 ,rrrr212241334 此可得出样品的电阻率为: 1111,2V,123,,，),(,rrrrI12241334 上式就是利用直流四探针法测量电阻率的普遍。 我们只需测出流过1、4 探针的电流I以及2、3 探针间的电位差V，代入四根探针的间距， 就可以23 求出该样品的电阻率ρ。实际测量中， 最常用的是直线型四探针(如图3所示)， 即四根探针的针尖位于同一直线上，并且间距相 V23,,2,S等， 设r=r=r=S，则有: 122334I 需要指出的是: 这一公式是在半无限大样 品的基础上导出的，实用中必需满足样品厚度及 边缘与探针之间的最近距离大于四倍探针间距， 图3 四探针法测量原理图 这样才能使该式具有足够的精确度。 如果被测样品不是半无穷大，而是厚度，横向尺寸一定，进一步的分析表明，在四探针法中只要对公式引入适当的修正系数B即可，此时: O V 23,,2,SIB0 anese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousanda Jap ling 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, kilhe end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in tp" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the endu-mopthe scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to " d can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife atterm illness an-Zhou Dana (male) weeks because of long 溇aiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang JiaYao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the k ight,ernment established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at n10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Gov school)], 4 4 house building as well as more than 1000 copies of books, more thant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notificationCounty Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistanup" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (-or six thousand, water and land go hand in hand "mop2 另一种情况是极薄样品，极薄样品是指样品厚度d比探针间距小很多，而横向尺寸为无穷大的样品，这时从探针1流入和从探针4流出的电流，其等位面近似为圆柱面高为d。 任一等位面的半径设为,，类似于上面对半无穷大样品的推导，很容易得出当r=r=r=S时，极薄样品的电阻率为: 122334 上式说明，对于极薄样品，在等间距探针情况下，探针间距和测量结果无关，电阻率和被测样品的厚度d成正比。 就本实验而言，当,、,、,、,四根金属探针排成一直线且以一定压力压在半导体材料上，在,、,两处探针间通过电流I，则,、,探针间产生电位差V。 23 VV2323,,2,S,C材料电阻率: (2) II (2)式中:S为相邻两探针,与,、,与,、,与,之间距， 就本实验而言，S=1mm， C,6.28,0.05 (mm)。 若电流取I = C 时，则ρ,V，可由数字电压表直接读出。 2、扩散层薄层电阻(方块电阻)的测量 半导体工艺中普遍采用四探针法测量扩散层的薄层电阻，由于反向PN 结的隔离作用，扩散层下的衬底可视为绝缘层，对于扩散层厚度(即结深X)远小于探j针间距S，而横向尺寸无限大的样品，则薄层电阻率为: 极薄样品，等间距探针情况 7 times, wound 13. The same day, Trang bang village heard the Japanese come to "mop rust a knife at the scene of his death. The body was stabbedterm illness and can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", th-Zhou Dana (male) weeks because of long 溇n Temple wall and met Yang Jiaiao yaw morning of September 18, the Japanese team went to the countryside "sweep" from the kaiyang village line to Tung Yang Jia Qclip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at night, Yao was burned several houses. 1938 ne"gazines, fires burnt down. In 1938, the Japanese learned that the national Government established in XI Tang Tomb rotten school)], 4 4 house building as well as more than 1000 copies of books, more than 10 kinds of collection of newspapers and maaosheng, six people received Wujiang underground County Government notificationchild Niu Jun (strict Tomb seventh district Chang) and the District Assistant Yu Xuchu, and players Jin Fuqin, and Shen B up" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (County Government II section chief) carrying its-and "mopd in hter to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand or six thousand, water and land go hannt in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is a Japanese go speak the Shanghai dialect, lang poian Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, killing 11 people on the River, East meetiher Zhou Yingbao to escape the Japanese army, was found on the road, a shot in the end. In March 1939, the Japanese army in Yd. The same day, is 7 zhouhaijiangzhi grandfatup" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the en-3 实际工作中，我们直接测量扩散层的薄层电阻，又称方块电阻，其定义就是表面为正方形的半导体薄层，在电流方向所呈现的电阻，见下图。 所以 : 因此有: 实际的扩散片尺寸一般不很大，并且实际的扩 散片又有单面扩散与双面扩散之分， 因此，需要 进行修正，修正后的公式为: 四、本仪器及实验的优点 采取四探针双位组合测量新技术提高了测量结果的准确度。该仪器采用了四探针双位组合测量新技术，将范德堡测量方法推广应用到直线四探针上，利用电流探针、电压探针的变换，进行两次电测量，能自动消除样品几何尺寸、边界效应以及探针不等距和机械游移等因素对测量结果的影响。因而每次测量不必知道探针间距、样品尺寸及探针在样品表面上的位置。由于每次测量都是对几何因素的影响进行动态的自动修正，因此显著降低了几何因素影响，从而提高了测量结果的准确度。所有这些，用目前大量使用的常规四探针测量方法所生产的仪器是无法实现的。 各种形状的薄膜材料及片状材料均可用该仪器测量。使用本仪器进行测量时,由于不需要进行几何边界条件和探针间距的修正，因而对各种形状的薄膜材料及片状材料有广泛的适用性。仪器特别适用于测量片状半导体材料电阻率以及硅扩散层、离子注入层、异型外延层等半导体器件和液晶片导电膜、电热膜等薄层(膜)的方块电阻。 设备简单，操作方便，精确度高。仪器以大规模集成电路为核心部件，特别 -mopthe scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to " d can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife atterm illness an-Zhou Dana (male) weeks because of long 溇aiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang JiaYao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the k ight,ernment established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at n10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Gov school)], 4 4 house building as well as more than 1000 copies of books, more thant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notificationCounty Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistanup" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (-or six thousand, water and land go hand in hand "mop anese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousanda Jap ling 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, kilhe end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in tp" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the endu4 采用了平面轻触式开关和各种工作状态LED指示，并应用了微计算机技术，利用HQ-710F型微计算机作为专用测量控制及数据处理器,使得测量、计算、读数更加直观、快速，并能打印全部预置和测量数据。 在半导体器件生产中广泛使用。四探针法除了用来测量半导体材料的电阻率以外，在半导体器件生产中广泛使用四探针法来测量扩散层薄层电阻，以判断扩散层质量是否符合设计要求。 因此，薄层电阻是工艺中最常需要检测的工艺参数之一。 克服了测试时探针与样品接触时产生的接触电势和整流效应的影响。本仪器设立有“粗调”、“细调”调零电路能产生一个恒定的电势来补偿附加电势的影响。仪器自较电路中备有精度为0.02,、阻值为19.96,的标准电阻,作为自校电路的基础，通过自校电路可以方便地对数字电压表精度和恒流源进行校准。 五、操作步骤(见使用说明书---使用方法) 1、显示板 2、单位显示灯 3、电流量程开关 4、工作选择开关(短路、测量、调节、自校选择)5、电压量程开关6、输入插座7、调零细调8、调零粗调9、电流调节10、电源开关11、电流选择开关 12、极性开关 六、实验内容 采用脱机及联机法测量。 1、方块电阻测量:根据(Va/Vb)值的大小，选择几何修正因子K的计算公式，然后用 R=K*(Va/I)计算方块电阻R 。 ?? 2、薄片体电阻率测量:若已知样片厚度W(W应在0.20—3.9mm)，按ρ= R*W*F(W/S)/10计算体电阻率。式中:W单位为mm，S=1mm(探针平均间距)，? F(W/S)为厚度修正因子，已存在微机内。 七、注意事项 her Zhou Yingbao to escape the Japanese army, was found on the road, a shot in the end. In March 1939, the Japanese army in Yd. The same day, is 7 zhouhaijiangzhi grandfatup" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the en-7 times, wound 13. The same day, Trang bang village heard the Japanese come to "mop rust a knife at the scene of his death. The body was stabbedterm illness and can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", th-Zhou Dana (male) weeks because of long 溇n Temple wall and met Yang Jiaiao yaw morning of September 18, the Japanese team went to the countryside "sweep" from the kaiyang village line to Tung Yang Jia Qclip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at night, Yao was burned several houses. 1938 ne"gazines, fires burnt down. In 1938, the Japanese learned that the national Government established in XI Tang Tomb rotten school)], 4 4 house building as well as more than 1000 copies of books, more than 10 kinds of collection of newspapers and maaosheng, six people received Wujiang underground County Government notificationchild Niu Jun (strict Tomb seventh district Chang) and the District Assistant Yu Xuchu, and players Jin Fuqin, and Shen B up" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (County Government II section chief) carrying its-and "mopd in hter to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand or six thousand, water and land go hannt in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is a Japanese go speak the Shanghai dialect, lang poian Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, killing 11 people on the River, East meeti5 1、Si片很脆，请同学们小心轻放;当探针快与Si片接触时，用力要很小，以免损坏探针及硅片。 2、要选择合适的电流量程开关，否则窗口无读数。 3、计算机按键要轻，以免损坏。 4、在测量过程中，由于附近其它仪器电源的开头可能会把计算机锁住而无法工作，此时应重新开机，即恢复正常。 5、每次测量应等所有数值稳定后方可按“测量”进行下一次测量。 八、思考 1、测量电阻有哪些方法, 2、什么是体电阻、方块电阻(面电阻), 3、四探针法测量材料的电阻的原理是什么, 4、为什么要用四探针进行测量，如果只用两根探针既作电流探针又作电压探针，是否能够对样品进行较为准确的测量? 5、四探针法测量材料电阻的优点是什么, 6、本实验中哪些因素能够使实验结果产生误差, 实验要求 1、针对讲义(本实验，教材上没有)及思考题，认真做好预习，并完成预习报 告。 2、没有预习报告者，不能做实验。 3、实验成绩更加注重平时成绩(占70%左右)，平时成绩由三部分组成: (1)预习报告及实验报告; (2)实验态度(如考勤，是否认真等); (3)回答问题。 希望班干部将上述内容及要求提前发给每一个学生。 a Jap ling 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, kilhe end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in tp" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the endu-mopthe scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to " d can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife atterm illness an-Zhou Dana (male) weeks because of long 溇aiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang JiaYao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the k ight,ernment established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at n10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Gov school)], 4 4 house building as well as more than 1000 copies of books, more thant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notificationCounty Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistanup" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (-or six thousand, water and land go hand in hand "mop anese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand6 SDY-5型双电测四探针测试仪技术说明书 一、概述 二、技术指标 三、测量原理与计算方法 四、仪器结构说明 五、使用方法 六、注意事项 七、打印机操作方法 一、概述 SDY-5型双电测四探针测试仪采用了四探针双位组合测量新技术，将范德堡测量方法推广应用到直线四探针上，利用电流探针、电压探针的变换，进行两次电测量，能自动消除样品几何尺寸、边界效应以及探针不等距和机械游移等因素对测量结果的影响。因而不必知道探针间距，样品尺寸及探针在样品表面上的位置。由于每次测量都是对几何因素的影响进行动态的自动修正，因此显著降低了几何因素影响，从而提高了测量准确度。用目前大量使用的常规四探针测量方法所生产的仪器是根本办不到的。 使用本仪器测量时，由于不需要进行几何边界条件和探针间距的修正，因而对各种形状的薄膜材料及片状材料有广泛的适用性。 仪器适用于测量片状半导体材料电阻率及硅扩散层、离子注入层、异型外延层等半导体器件和液晶片导电膜、电热膜等薄层(膜)的方块电阻。 仪器以大规模集成电路为核心部件，并应用了微计算机技术。利用HQ-710F型微计算机作为专用测量控制及数据处理器，使得测量、计算、读数更加直观、快速，并能打印全部预置和测量数据。 二、 技术指标 1. 测量范围: 硅片电阻率:0.01—200Ω.cm (可扩展) 薄层电阻: 0.01—2000Ω/口 (可扩展) (方块电阻) 可测晶片直径:最大直径100 mm(配J-2型手动测试架) 200 mm(配J-5型手动测试架) 可测晶片厚度:? 3.00 mm 2. 恒流电源: 电流量程分为100μm、1mA、10mA、100mA四档。各档电流连续可调。稳定度优于0.1% 3. 数字电压表: 量程:0-199.99mV; 分辨率:0.01 mV 显示:四位半红色发光管数字显示.极性、小数点、超量程自动显示。 精度:?0.1% 4. 模拟电路测试误差:(用1、10、100、1000Ω精密电阻) ??0.3%?1字 5. 整机准确度:(用0.01—200Ω.cm硅标样片测试) <5% 6. 微计算机功能: (1)键盘控制测量取数,自动控制电流换向和电流、电压探针的变换，并进行正、反向电流下的测量，显示出平均值。 (2)键盘控制数据处理，按内在公式计算出薄层电阻或电阻率平均值以及百分变化。 (3)键盘控制打印全部测量数据。包括测量条件，各次测量平均值、最大值、最小值、百分变化等数据。 nt in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is a Japanese go speak the Shanghai dialect, lang poian Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, killing 11 people on the River, East meetiher Zhou Yingbao to escape the Japanese army, was found on the road, a shot in the end. In March 1939, the Japanese army in Yd. The same day, is 7 zhouhaijiangzhi grandfatup" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the en-7 times, wound 13. The same day, Trang bang village heard the Japanese come to "mop rust a knife at the scene of his death. The body was stabbedterm illness and can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", th-Zhou Dana (male) weeks because of long 溇n Temple wall and met Yang Jiaiao yaw morning of September 18, the Japanese team went to the countryside "sweep" from the kaiyang village line to Tung Yang Jia Qclip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at night, Yao was burned several houses. 1938 ne"gazines, fires burnt down. In 1938, the Japanese learned that the national Government established in XI Tang Tomb rotten school)], 4 4 house building as well as more than 1000 copies of books, more than 10 kinds of collection of newspapers and maaosheng, six people received Wujiang underground County Government notificationchild Niu Jun (strict Tomb seventh district Chang) and the District Assistant Yu Xuchu, and players Jin Fuqin, and Shen B up" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (County Government II section chief) carrying its-and "mopd in hter to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand or six thousand, water and land go han7 7、外形尺寸: 电气主机:360mm×320mm ×100mm 微计算机:300mm×210mm ×105mm 8、仪器重量: 电气主机:约4kg ;测试架(J-2型):约7 kg ;微计算机:约2kg; 9、电源:AC220V?10% ，50Hz ，功率<25W; 10、测试环境:温度23?2ºC;相对湿度?65%;无高频干扰。 三、 测量原理与计算方法 Va Vb 1 2 3 4 1 2 3 4 图1 双电测四探针法示意图 图1. 双电测四探针法示意图 将直线型探针垂直压在被测样品表面上，按以下程序测量: +1、 电流I从1——4针，2、3针测得电压Va;电流换向，I从4——1针，2、3针测得电 -+-压Va，计算正反向测量平均值。Va=(Va+ Va)/2 +2、 电流I从1——3针，2、4针测得电压Vb;电流换向，I从3——1针，2、4针测得电 -+-压Vb，计算正反向测量平均值。Vb=(Vb+ Vb)/2 3、计算(Va/Vb)值。Va、Vb均以mV为单位。 4、按以下两公式计算几何修正因子K 若1.18<(Va/Vb)?1.38时 2 K = -14.696+25.173(Va/Vb)-7.872(Va/Vb) …..(1) 若1.10?(Va/Vb)?1.18时 2 K = -15.85+26.15(Va/Vb)-7.872(Va/Vb) …..(2) 5、计算方块电阻R : ? R=K*(Va/I) ?/? …(3) ? I以mV为单位. 6、若已知样片厚度W(W应在0.20—3.9mm)还可按下式计算体电阻率ρ ρ= R*W*F(W/S)/10 ? W单位为mm，S=1mm(探针平均间距)，F(W/S)为厚度修正因子，已存在微机内。 四、 仪器结构(略) 五、 使用方法 系统连接完毕后，按以下步骤测试: -mopthe scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to " d can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife atterm illness an-Zhou Dana (male) weeks because of long 溇aiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang JiaYao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the k ight,ernment established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at n10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Gov school)], 4 4 house building as well as more than 1000 copies of books, more thant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notificationCounty Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistanup" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (-or six thousand, water and land go hand in hand "mop anese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousanda Jap ling 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, kilhe end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in tp" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the endu8 1、 接通主机电源。此时“Va”指示灯和“I”指示灯亮。 2、 根据所测样片电阻率，或方块电阻，选择电流量程，按下K1、K2、K3、K4相应的键， 对应的量程指示灯亮。 表1、方块电阻测量时电流量程选择表 方块电阻Ω 电流量程mA , 2.5 100 2.0~25 10 20~250 1 ,200 0.1 表2、电阻率测量时电流量程选择表 电阻率Ω?cm 电流量程mA , 0.012 100 0.01~0.6 10 0.3~60 1 30~1000 0.1 3、 放置样品，压下探针，主机显示屏显示电流值，调节电位器W1、W2使显示4532(也可显示其他值)。 以下分脱(微)机测量和联(微)机测量两种。 4、脱(微)机测量:仅适用于主机测量方块电阻。 (1)按I/V选择键K6，此时“V”指示灯亮，进入测量状态。 a+ ;按换向键K7，测出Va- 。计算Va 。 (2)在“Va(R口)”指示灯亮的情况下，测出V (3)按Va /Vb选择键K5，此时“Vb” 指示灯亮，测出Vb- ;按换向键K7，测出Vb+ 。计算Vb 。 (4)计算出Va /Vb (5)按公式(1)或(2)计算K值。 (6)选取电流I=K 例:若计算出K=4.517，此时应按K6键，使“I”灯亮，调节电位器W1、W2，使主机显示电子流数为4517。 (7)按下K6键，使“V”指示灯亮;按K5键，使“Va(R口)”指示灯亮。此时主机显示值为实际方块电阻(Ω/口) (8)对于双面扩散硅片和无穷大的衬底为绝缘的导电薄膜K=4.532 (9)若不做高精确测量,对于单面扩散片和有限尺寸的导电薄膜,(直径或线度至少在50mm以上),也可选取K=4.532 5、联(微)机测量 : (1)接通微机电源，显示H-710F-1(或H-710F-2)，此时通过按K5键和K7键，应使电流换向指示灯熄灭和“Va”指示灯点燃，否则不能起自动控制作用，因而不能用微机控制和测量。 (2)利用键盘置入“日期、温度”(仅作记录用) (3)置入电流“量程”和电流值。应分别与主机所选择和显示的数值一致。 (4)置入打印格式。根据需要选择第一种工第二种格式，使显示H-710F-1(或H-710F-2)。为减轻打印机磨损，一般可选用第一种格式。 (5)置入“厚度”，若测量R，置入数字1;若测量ρ，按片厚实际值置入(以mm为单位)。 口 (6)以上条件全部置入后，按测量键，即可打印全部预置数据并进入测量状态。 若经检查数据有误，可按回车重新预置;预置“电流”必须在预置“量程”后进行，预置完毕后，再按测量键，即打印出已修改和未修改的预置数据，即可开始测量。 her Zhou Yingbao to escape the Japanese army, was found on the road, a shot in the end. In March 1939, the Japanese army in Yd. The same day, is 7 zhouhaijiangzhi grandfatup" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the en-7 times, wound 13. The same day, Trang bang village heard the Japanese come to "mop rust a knife at the scene of his death. The body was stabbedterm illness and can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", th-Zhou Dana (male) weeks because of long 溇n Temple wall and met Yang Jiaiao yaw morning of September 18, the Japanese team went to the countryside "sweep" from the kaiyang village line to Tung Yang Jia Qclip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at night, Yao was burned several houses. 1938 ne"gazines, fires burnt down. In 1938, the Japanese learned that the national Government established in XI Tang Tomb rotten school)], 4 4 house building as well as more than 1000 copies of books, more than 10 kinds of collection of newspapers and maaosheng, six people received Wujiang underground County Government notificationchild Niu Jun (strict Tomb seventh district Chang) and the District Assistant Yu Xuchu, and players Jin Fuqin, and Shen B up" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (County Government II section chief) carrying its-and "mopd in hter to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousand or six thousand, water and land go hannt in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is a Japanese go speak the Shanghai dialect, lang poian Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, killing 11 people on the River, East meeti9 注意:置入有数值的条件时，要先置入数据，再按所置入的项目键。以下分三种测量方式加以叙述: (7)一步测量: 按主机I/V选择键K6、使“V”指示灯亮，进入 测量状态。 按微机“测量”键测量，利用“测量”键、“重测”键、与手动测试架配合，可完成全部测试，最后一点测完，按“打印”键，打印各点R口(ρ)值，以及并最大值、最小值、最大变化率、平均变化率和径向不均匀度。若测量从头开始，则按“清0”键，从第一点重测。 注:测量点少于3点时，“打印”不能执行，发出长声显示dЭ。 (8)分步测量 按回车测量键，打印预置数据。 按Va键，测量V a值(并求平均) 按Vb键，测量Vb值(并求平均) (A)按Va /Vb键，求Va /Vb值。 (B)按K(R键, 求K值. 按KR键, 求R口或ρ值。 (A)(B)两项操作也可以省去，不影响测量结果。 (9)输入Va 、Vb 值验算， Va /Vb、K、R口或ρ诸值。 例:设Va=62.50mV, Vb=50.00 mV 按 62.50Va 50.00Vb (A)按Va /Vb显示1.25 (B)按KR显示4.47025 再按KR显示61.64497(此值是I=4.532mA计算结果,应按此值置入电流) (A)(B)两项操作也可以省去 以上三种方式,可互相穿插进行，测量各点数据可互相衔接，但实际测量时并无此必要，一般以一次测量为宜。 (10)若更换样品继续测量时，不修改预置条件，可按清0键，清除所有测量数据，即可开始测量;若要修改某一个或几处预置值，可按回车键，显示口h，对于某一预置修改，只按某一条件键，不修改的仍保留原来值，再按测量键，即打印出已修改的预置数值，此时即开始测量。 六、 注意事项 1、 若被测样品为硅材料，其制备应符合GB6615-86中有关规定。 2、 计算机按键不可用大力按，以免损坏。 3、 在测量过程中，由于附近其他仪器电源的开关动作有时会反计算机锁住，而无法工作， 此时应关机，再重新开机，即恢复正常。 4、 每次测量完毕，应等主机与微机均显示稳定数值后，方可按“测量”键进行下次测量。 5、 切忌用手直接触摸集成电路，切忌对本机直接使用交流220V的烙铁，以防损坏芯片。 必须使用电铁时，应将电源拔下，利用烙铁余热焊接。 七、打印机操作方法(略) -or six thousand, water and land go hand in hand "mop anese go speak the Shanghai dialect, later to be called Gu Tong as "kill left." On January 18, 1943, the elves, five thousanda Jap ling 11 people on the River, East meeting point in wood qiaotu in the afternoon killing 4 people on the Riverside. Gu Tong is. In March 1939, the Japanese army in Yan Tomb raiding, has arrested 16 people, in fengqiao cigarettes this morning bang, kilhe end. The same day, is 7 zhouhaijiangzhi grandfather Zhou Yingbao to escape the Japanese army, was found on the road, a shot in tp" are hiding, mother of 9 Zhou Guanbao Zhang Aying to drill a "dry mound", was discovered by the Japanese, a shot in the endu-mopthe scene of his death. The body was stabbed 7 times, wound 13. The same day, Trang bang village heard the Japanese come to " d can't work in the fields, the Japanese see his face from scratch without calluses, regard him as "Shina", thrust a knife atterm illness an-Zhou Dana (male) weeks because of long 溇aiyang village line to Tung Yang Jia Qiao yan Temple wall and met Yang JiaYao was burned several houses. 1938 new morning of September 18, the Japanese team went to the countryside "sweep" from the k ight,ernment established in XI Tang Tomb rotten "clip" taxes, tax officers live in 8 of Yan Dong village farmers home, troops at n10 kinds of collection of newspapers and magazines, fires burnt down. In 1938, the Japanese learned that the national Gov school)], 4 4 house building as well as more than 1000 copies of books, more thant Yu Xuchu, and players Jin Fuqin, and Shen Baosheng, six people received Wujiang underground County Government notificationCounty Government II section chief) carrying its child Niu Jun (strict Tomb seventh district Chang) and the District Assistanup" jiaxing area west of the railway, Yan Tomb area fall. March 6, Niu Shan (10