质量流量控制器

BU LL ET IN E M 20 09 10 G FC Model GFC thermal Mass Flow Controllers are designed to indicate and control set flow rates of gases. The GFC combines the characteristics and accuracy of conventional mass flow devices into a unique compact design at low costs previously unattainable. Each of these controllers incorporates an advanced straight tube sensor in conjunc- tion with flow passage elements constructed of aluminum and brass for non-corrosive gases or 316 stainless steel for corrosive applications. Zero and span adjustments are accessible from the outside of transmitters. Principles of Operation Metered gases are divided into two laminar flow paths, one through the primary flow conduit, and the other through a capillary sensor tube. Both flow conduits are designed to ensure laminar flows and therefore the ratio of their flow rates is constant. Two precision temperature sensing windings on the sensor tube are heated, and when flow takes place, gas carries heat from the upstream to the downstream windings. The resultant temperature differential is proportion- al to the change in resistance of the sensor windings. A Wheatstone bridge design is used to monitor the temperature dependent resistance gradient on the sensor windings which is linearly proportional to the instan- taneous rate of flow. Output signals of 0 to 5Vdc and 4 to 20mA are generated indicating mass molecular based flow rates of the metered gas. The combined gas streams flow through a pro- portionating electromagnetic valve with an appropriately selected orifice.The closed loop control circuit continuously monitors the mass flow output and maintains it at the set flow rate. Flow rates are unaffected by temperature and pressure variations within stated limitations. Design Features � Rigid metallic construction. � Maximum pressure of 1000 psig (70 bars). � Leak integrity 1 x 10-7 smL/sec of helium. � NIST traceable certification. � Built-in tiltable LCD readout. � Local or remote setpoint control. � 0-5 Vdc and 4-20 mA signals. � Circuit protection. � Totalizer option. General Description Compact, self-contained GFC mass flow controllers are designed to indicate and control flow rates of gases. The rugged design cou- pled with instrumentation grade accuracy provides versatile and economical means of flow control. Aluminum or stainless steel models with readout options of either engineering units (standard) or 0 to 100 percent displays are available. MASS FLOW CONTROLLERS GFC Typical Stainless Steel GFC Mass Flow Controller NIST Traceable Calibration 16www.aalborg.com - e-mail � info@aalborg.com - � 845.770.3000 - fax 845.770.3010 - Toll Free in U.S.A. and Canada 1.800.866.3837 BULLETIN EM 200910 G FC 17 MASS FLOW CONTROLLERS GFC **The selection of materials of construction, is the responsibility of the customer. The company accepts no liability. www.aalborg.com - e-mail � info@aalborg.com - � 845.770.3000 - fax 845.770.3010 - Toll Free in U.S.A. and Canada 1.800.866.3837 The built-in electromagnetic valve allows the flow to be set to any desired flow rate within the range of the particular model. Setpoints are controlled either locally or remotely. The valve is normally closed as a safety feature to ensure that gas flow is shut off in case of a power outage. The LCD readout built into the top of the transducer is tiltable over 90 degrees to provide optimal reading comfort. It is connected to the transducer by a standard modular plug, and is readily removable for remote reading installations. Transducers without LCD readout are offered for OEM applica- tions. GFC mass flow controllers are available with flow ranges from 10 mL/min to 1000 sL/min N2.Gases are con- nected by means of 1/4", 3/8", or optional 1/8" compression fittings and 3/4" FNPT fittings. Optional fittings are avail- able. These controllers may be used as bench top units or mounted by means of screws in the base.Transducer power supply ports are fuse and polarity protected. Leak Integrity 1 x 10-7 smL/sec of helium maximum to the outside environment. TABLE 10 - SPECIFICATIONS ACCURACY: ACCURACY %FS OPTIONAL ENHANCED ACCURACY %FS MODEL: GFC 17, 37 GFC 47, 57, 67, 77 MODEL: GFC 17 GFC 37, 47, 57, 67, 77 FLOW RANGE 0-100% 20-100% 0-20% FLOW RANGE 0-100% 20-100% 0-20% ACCURACY ±1.5% ±1.5% ±3% ACCURACY ±1% ±1% REF DATA with ±1% CALIBRATIONS: Performed at standard conditions [14.7 psia (101.4 kPa) and 70 FF (21.1FC)] unless otherwise requested. REPEATABILITY: ±0.5% of full scale. RESPONSE TIME: Generally 2 seconds to within ±2% of actual flow rate over 25 to 100% of full scale. TEMPERATURE COEFFICIENT: 0.15% of full scale / FC. PRESSURE COEFFICIENT: 0.01% of full scale / psi (0.07 bar). PRESSURE DROP: See Table 12. OPTIMUM GAS PRESSURE: 25 psig (1.73 bars). MAX. GAS PRESSURE: 1000 psig (70 bars) maximum GFC 17, 37, 47. 500 psig (34.5 bars) GFC 57, 67, 77. MAX. DIFF. PRESSURE: 50 psi for GFC 17/37/57/67 and 77 (3.4 bars), 40 psi for 47 (2.7 bars). GAS and AMBIENT TEMP: 32 FF to 122 FF (0 FC to 50 FC). 14 FF to 122 FF (-10 FC to 50 FC) - Dry gases only. **MATERIALS FLUID CONTACT: a. Aluminum models GFC Series: anodized aluminum, 316 stainless steel, brass and Viton® O-rings. b. Stainless steel models GFC17S, 37S, 47S, 57S, 67S and 77S: 316 stainless steel and Viton® O-rings. Optional O-rings: Buna® , EPR and Kalrez® . ATTITUDE SENSITIVITY: No greater than +15 degree rotation from horizontal to vertical; standard calibration is in horizontal position. OUTPUT SIGNALS: Linear 0-5 Vdc. (1000 ohms min. load impedance); 4-20 mA (0-500 ohms loop resistance) Max noise ±20mV. COMMAND SIGNALS: Analog 0-5 Vdc or 4-20 mA for remote set point mode; NPN compatible purge /valve off. CONNECTIONS: GFC 17 and 37: 1/4" compression fittings. Optional: 6mm compression, 1/4" VCR® , 3/8" or 1/8" compression fittings. GFC 47: 3/8" compression fittings. GFC 57: 3/8" compression fittings. GFC 67: 1/2" compression fittings. GFC 77: 3/4" FNPT fittings. Optional: 3/4" compression fittings. LEAK INTEGRITY: 1 x 10-7 smL/sec of helium maximum to the outside environment. TRANSDUCER INPUT POWER: +12 Vdc, 800 mA; +24 Vdc, 650 mA optional. CIRCUIT PROTECTION: Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection. DISPLAY: 3-1/2 digit LCD, 0.5" high characters. CE COMPLIANT: EN 55011 class 1, class B; EN50082-1. BU LL ET IN E M 20 09 10 G FC TABLE 11 - FLOW RANGES FOR GFC GFC 17 LOW FLOW MASS FLOW CONTROLLER CODE std mL / min [N2] 01 0 to 10 02 0 to 20 03 0 to 50 04 0 to 100 05 0 to 200 06 0 to 500 CODE std liters / min [N2] 07 0 to 1 08 0 to 2 09 0 to 5 10 0 to 10 GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER 11 0 to 15 30 20 31 30 32 40 33 50 GFC 47 /57 /67 /77 HIGH FLOW MASS FLOW CONTROLLER 40 60 41 80 42 100 50 200 60 500 70 1000 MASS FLOW CONTROLLERS 18 GFC TABLE 12 - MAXIMUM PRESSURE DROP FOR GFC MODEL FLOW RATE [std liters/min] MAXIMUM PRESSURE DROP [mm H2O] [psid] [mbar] GFC 17 UP to 10 720 1.06 75 GFC 37 15 2630 3.87 266 20 1360 2.00 138 30 2380 3.50 241 40 3740 5.50 379 50 5440 8.00 551 GFC 47 60 7480 11.00 758 100 12850 18.89 1302 GFC 57 200 7031 10.00 690 GFC 67 500 8437 12.00 827 GFC 77 1000 10547 15.00 1034 www.aalborg.com - e-mail � info@aalborg.com - � 845.770.3000 - fax 845.770.3010 - Toll Free in U.S.A. and Canada 1.800.866.3837 TABLE 13 - ACCESSORIES FOR GFC TOTALIZER TOT-10-0C Totalizer (5Vdc - 10Vdc signals), calibrated. TOT-10-0N Totalizer (5Vdc - 10Vdc signals), uncalibrated. CBL-TOT10 Cable & splitter, used in conjunction w/ display. IO INPUT /OUTPUT IO-232-C Input/output to RS232, 0-5Vdc. IO-232-E Input/output to RS232, 4-20mA. IO-485-C Input/output to RS485, 0-4Vdc. IO-485-E Input/output to RS485, 4-20mA. POWER SUPPLY - BATTERY PACK - CABLES PS-GFC-110NA-2 Power Supply, 110 V/12 Vdc /North America PS-GFC-110NA-4 Power Supply, 110 V/24 Vdc /North America PS-GFC-230EU-2 Power Supply, 220 V/12 Vdc /Europe PS-GFC-230EU-4 Power Supply, 220 V/24 Vdc /Europe PS-GFC-240UK-2 Power Supply 240 V/12 Vdc /United Kingdom PS-GFC-240UK-4 Power Supply 240 V/24 Vdc /United Kingdom PS-GFC-240AU-2 Power Supply 240 V/12 Vdc /Australia PS-GFC-240AU-4 Power Supply 240 V/24 Vdc /Australia CBL-DGS Cable, Shielded 15-pin D-connector /end terminated 17/ 3RC Remote Cable, 3 feet long 17/ R Remote LCD readout with 3 feet long cable GFC 57, 67 and 77 Series Aluminum and Stainless Mass Flow Controllers BULLETIN EM 200910 G FC D E E 6-32 I B C DASHED LINE FOR HIGH FLOW UNITS VERSION NO LCD F C A H D G * * * 2.38 0.95 TABLE 14 - DIMENSION FOR GFC MODEL CONNECTION Compression Fitting (except model GFC 77) DIMENSION (INCH) LCD VERSION NO LCD A B C/*C D/*D E/*E F G H GFC17 1/4" Tube O Dia. 5.60 1.00 1.00 4.27 6.29 0.69 2.69 4.50 GFC37 1/4" Tube O Dia. 5.98 1.37 1.25 5.19 7.21 0.69 2.69 4.88 GFC47 3/8" Tube O Dia. 5.98 1.37 1.25 5.19 7.33 0.69 2.69 4.88 GFC57 3/8" Tube O Dia. 6.60 2.00 1.75 10.2 12.3 0.99 4.69 5.50 GFC67 1/2" Tube O Dia. 7.56 3.00 3.00 10.2 12.4 1.69 - 6.46 GFC77 3/4" NPT Female 8.56 4.00 4.00 10.5 - - - 7.46 NOTE: Only 12Vdc for models GFC 57, 67 and 77. For Specific Flow Ranges Contact Aalborg Customer Service Department. GFC Mass Flow Controller MASS FLOW CONTROLLERS GFC 19 www.aalborg.com - e-mail � info@aalborg.com - � 845.770.3000 - fax 845.770.3010 - Toll Free in U.S.A. and Canada 1.800.866.3837 BU LL ET IN E M 20 09 10 G FC 20 ORDERING INFORMATION MASS FLOW CONTROLLERS GFC GFC MODEL MAX. FLOW (N2) 17 10 L/min 37 50 L/min 47 100 L/min 57 200 L/min 67 500 L/min 77 1000 L/min MATERIAL A Aluminum S Stainless Steel CONNECTOR D D Connector DIGITAL INTERFACE 0 None DISPLAY N No display L LCD readout POWER 2 12 Vdc 4 24 Vdc INPUT/OUTPUT SIGNAL A Local 0-5 Vdc B Local 4-20mA C 0-5Vdc/0-5Vdc D 0-5Vdc/4-20mA E 4-20mA/4-20mA F 4-20mA/0-5Vdc SEALS V Viton® B Buna® E EPR T PTFE/ Kalrez® FITTINGS MODEL A 1/4" Compression GFC 17, 37 B 1/8" Compression GFC 17 C 1/4" VCR® GFC 17, 37 D 3/8" Compression GFC 17, 37, 47, 57 E 1/2" Compression GFC 67 F 3/4" FNPT GFC 77 G 3/4" Compression GFC 77 H 6mm Compression GFC 17, 37 EXAMPLE: GFC17S-VADL2-C0 10 L/min [N2] 20 psig SPECIFY: GAS, FLOW RANGE and PRESSURE GFC17 stainless steel, Viton® seals, 1/4" compression fittings, D connector with display, 12Vdc, 0-5 Vdc. Out put signal, No digital interface GFC 17 S V A D L 2 C 0 www.aalborg.com - e-mail � info@aalborg.com - � 845.770.3000 - fax 845.770.3010 - Toll Free in U.S.A. and Canada 1.800.866.3837