AttorneyReferenceDECLARATIONFORUNITEDSTATESPATENTAPPLICATION,POWEROFATTORNEY,DESIGNATIONOFCORRESPONDENCEADDRESSAsabelownamedinventor,Iherebydeclarethatmyresidence,postofficeaddressandcitizenshipareasstatedbelownexttomyname,andthatIbelieveIamtheoriginal,firstandsoleinventor(ifonlyonenameislistedbelow)oranoriginal,firstandjointinventor(ifpluralnamesarelistedbelow)ofthesubjectmatterwhichisclaimedandforwhichapatentissoughtontheinventionentitledPRECISEPOSITIONINGSYSTEMFORDUALSTAGESWITCHINGEXPOSUREthespecificationofwhich[ ]isattachedhereto.[]wasfiledon ,asApplicationSerialNo. ,andwasamendedon [ifapplicable];[√]wasfiledunderthePatentCooperationTreatyon 20Nov.2006 ,SerialNo. PCT/CN2006/003126 ,theUnitedStatesofAmericabeingdesignated,andwasamendedon [ifapplicable].IherebystatethatIhavereviewedandunderstandthecontentsoftheabove-identifiedspecification,includingtheclaimsasamendedbyanyamendmentsspecificallyreferredtoherein.IacknowledgethedutytodisclosetothePatentandTrademarkOfficeallinformationknowtometobematerialtopatentabilityasdefinedin37CFR1.56,includingforcontinuation-in-partapplications,materialinformationwhichbecameavailablebetweenthefilingdateofthepriorapplicationandthenationalorPCTinternationalfilingdateofthecontinuation-in-partapplication.Iherebyclaimforeignprioritybenefitsunder35U.S.C.119(a)-(d)or(f),or365(b)ofanyforeignapplication(s)forpatent,inventor’sorplantbreeder’srightscertificate(s),or365(a)ofanyPCTinternationalapplicationwhichdesignatedatleastonecountryotherthantheUnitedStatesofAmerica,listedbelowandhavealsoidentifiedbelow,bycheckingthebox,anyforeignapplicationforpatent,inventor’sorplantbreeder’srightscertificate(s),oranyPCTinternationalapplicationhavingafilingdatebeforethatoftheapplicationonwhichpriorityisclaimed.PriorForeignApplication(s) PriorityClaimedNumber Country DateFiled Yes No200620044000.2CN18Jul.2006√IherebyclaimthebenefitunderTitle35,UnitedStatesCode,§120ofanyUnitedStatesapplication(s)listedbelowand,insofarasthesubjectmatterofeachoftheclaimsofthisapplicationisnotdisclosedinthepriorUnitedStatesapplicationinthemannerprovidedbythefirstparagraphofTitle35,UnitedStatesCode,§112,IacknowledgethedutytodisclosetothePatentandTrademarkOfficeallinformationknowntometobematerialtopatentabilityasdefinedinTitle37,CodeofFederalRegulations,§1.56whichbecameavailablebetweenthefilingdateofthepriorapplicationandthenationalorPCTinternationalfilingdateofthisapplication.ApplicationSerialNo. FilingDate StatusIherebyappointthefollowingattorneystoprosecutethisapplicationandtotransactallbusinessintheUnitedStatesPatentandTrademarkOfficeconnectedtherewith:StevenM.Rabin(Reg.No.29,102),RobertH.Berdo,Jr.(Reg.No.38,075)andAllenWood(Reg.No.28,134),110114Street,N.W.,Suite500,Washington,D.C.20005,Telephone:(202)371-8976;Fax:(202)408-0924. Addressallcorrespondenceto:*23995*23995PatentTrademarkOfficeTheundersignedherebyauthorizestheU.S.attorneysnamedhereintoacceptandfollowinstructionsfromtheundersigned'sassignee,ifany,and/or,iftheundersignedisnotaresidentoftheUnitedStates,theundersigned'sdomesticattorney,patentattorney,patentagent,orpatentrepresentativeastoanyactiontobetakeninthePatentandTrademarkOfficeregardingthisapplicationwithoutdirectcommunicationbetweentheU.S.attorneysandtheundersigned. Intheeventofachangeintheperson(s)fromwhominstructionsmaybetaken,theU.S.attorneysnamedhereinwillbesonotifiedbytheundersigned.Iherebydeclarethatallstatementsmadehereinofmyownknowledgearetrueandthatallstatementsmadeoninformationandbeliefarebelievedtobetrue;andfurtherthatthesestatementsweremadewiththeknowledgethatwillfulfalsestatementsandthelikesomadearepunishablebyfineorimprisonment,orboth,under§1001ofTitle18oftheUnitedStatesCodeandthatsuchwillfulfalsestatementsmayjeopardizethevalidityoftheapplicationoranypatentissuedthereon.Signature:Date:SoleorFirstJointInventor:YingshengLICitizenship: People’sRepublicofChinaResidence(CityandCountry):Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:SecondJointInventor:XiaopingLICitizenship: People’sRepublicofChinaResidence(CityandCountry):Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:ThirdJointInventor:ZhiyongYANGCitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:FourthJointInventor:JunGUANCitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:FifthJointInventor:ShaowenGAOCitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:SixthJointInventor:WenfengSUNCitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:SeventhJointInventor:GangLICitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,ChinaSignature:Date:EighthJointInventor:YanminCAICitizenship: People’sRepublicofChinaResidence(CityandCountry)Shanghai,ChinaPostOfficeAddress: 1525ZhangdongRoad,Zhangjianghigh-techpark,Shanghai201203,China