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正性光刻胶 MSDS

2017-11-11 10页 doc 34KB 53阅读

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正性光刻胶 MSDS正性光刻胶 MSDS SUZHOU RUIHONG ELECTRONIC CHEMICALS CO. LTD Material Safety Data Sheet Section 1 - Product and Company Identification Product Identification: RZJ-300(RZJ-390,RZJ-390PG.RZJ-390H,RZJ-304,RZJ-306) Manufacturer's Name: Suzhou Ruihong electronic chemic...
正性光刻胶 MSDS
正性光刻胶 MSDS SUZHOU RUIHONG ELECTRONIC CHEMICALS CO. LTD Material Safety Data Sheet Section 1 - Product and Company Identification Product Identification: RZJ-300(RZJ-390,RZJ-390PG.RZJ-390H,RZJ-304,RZJ-306) Manufacturer's Name: Suzhou Ruihong electronic chemicals co.,ltd. Manufacturer's Address: 81,Suli Road, Wuzhong district, Suzhou City, P. R. China. Manufacturer's Country: P. R. China. General Information Telephone: 0086-512-65284373, 65281007/FAX:0086-512-65279925 Emergency Telephone: 0086-512-65284373 Section 2 - Composition/Information on Ingredients COMPONENT CAS-NO. CONCENTTRATION Propyleneglycolmonomethyletheracetate 108-65-6 73% Cresol-Formaldehyde Novolak Resin 9016-83-5 21% 6-Dizao-5, 6-Dihydoro-5-Oxo-1- Naphthalenesulfonic acid, Ester with 68510-93-0 6% 2,3,4-Trihydroxybenzophenone Section 3 - Hazards Identification FLAMMABLE Irritating to eyes. Classified as hazardous according to regulatory criteria. Japan Chemical Industry Association Classification Flammable liquid Section 4 - First Aid Measures INHALATION: Remove from exposure. If there is difficulty in breathing. Seek medical attention if symptoms persist. SKIN CONTACT: Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse. EYE CONTACT: Flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention. INGESTION: If person is unconscious, turn head to side. Never make an unconscious person vomit or drink fluids. When vomiting occurs, keep head lower than hips to help prevent aspiration. Contact local poison control center or physician immediately. Get medical attention. NOTE TO PHYSICIAN: Treat symptomatically. Page 1 of 6 Section 5 - Fire Fighting Measures SUITABLE EXTINGUISHING MEDLA: Use water spray, foam, dry chemical or carbon dioxide . Keep containers and surroundings cool with spray. SPECIFIC HAZARDS DURING FIRE FLGHTING: This product may give rise to hazardous vapors in a fire. Vapors can travel a considerable distance to a source of ignition and result in flashback. SPECIAL PROTECTIVE EQUIPMENT FOR FIRE-FIGHTERS: Wear full protective clothing and self-contained breathing apparatus. FURTHER INFORMATION: Pressure may build up in closed containers with possible liberation of combustible vapors. Section 6 - Accidental Release Measures PERSONAL PRECAUTIONS: Wear suitable protective clothing. Wear respiratory protection. Eliminate all ignition sources. ENVIRONMENTAL PRECAUTIONS: Prevent the material from entering drains or water courses. Do not discharge directly to a water source. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation . METHODS FOR CLEARING UP: Cover with absorbent or contain. Collect and dispose. Section 7 - Handling and Storage HANDLING Use local exhaust ventilation. Avoid contact with eyes, skin and clothing. Keep container tightly Closed. Further information on storage conditions; Proprietary photo resist film contains approximately 2-4% of 2.3.4-trihydroxybenzophenone (THBP).Which may sublime during soft-bake or hard-bake processing. THBP has low acute toxicity (LD50>5g/kg). Contact with eyes. Skin or mucous membranes cause irritation. To prevent accumulation of THBP on equipment surfaces and ventilation ducts, preventative maintenance program including regular cleaning should be implemented. Wipe surfaces using an appropriate cleaning solvent when possible. Provide adequate general or local exhaust ventilation during the cleaning process. In situations where this is not possible or where solvent or dust concentrations become excessive. Use an air purifying respirator with an organic vapor/toxic particulate cartridge. When cleaning residual THBP, wear protective gloves and adequate protective clothing to prevent skin contact. Practice good personal hygiene to prevent accidental exposure. Clean all protective clothing and equipment thoroughly after each use. STORAGE Storage conditions; Store in original container. Keep away from heat and sources of ignition, Page 2 of 6 Storage area should be cool dry well ventilated out of direct sunlight Section 8 - Exposure Controls & Personal Protection EXPOSURE LIMITS: Exposure limits are listed below, if they exist. Component Regulation Type of listing Value 2-methoxy-1-methylethyl Rohm and Haas TWA 30ppm Acetate Rohm and Haas STEL 90ppm Rohm and Haas Absorbed via Skin OEL (EU) TWA 275mg/m3 50ppm OEL (EU) STEL 550mg/m3 100ppm OEL (EU) Skin EXPOSURE CONTROLS EYE PROTACTION: goggles HAND PROTECTION: Butyl rubber gloves. Other chemical resistant gloves may be recommended by your safety professional. SKIN AND BODY PROTECTION: Normal work wear. RESPIRATORY PROTOCTION: Respiratory protection if there is a risk of exposure to high vapor concentrations. The specific respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits respirator. ENGINEERING MEASURES: Engineering methods to prevent or control exposure are preferred. Methods include process or personnel enclosure, mechanical ventilation (local exhaust), and control of process conditions. Section 9 - Physical & Chemical Properties PHYSICAL STATE: liquid COLOR: Red Amber ODOUR: Ester-like BOILING POINT: ca.146? FLASH POINT: 40-46? VAPOR PRESSURE: 3.7 mmHg at 20 ? RETATIVE DENSITY: 0.80-1.00 WATER SOLUBILITY: Insoluble PH: neutral EVAPORATION RATE: Slower than ether VOC’S:727-950 g/l NOTE: The Physical date presented above are typical values and should not be construed as a specification. Section 10 - Stability & Reactivity Data Page 3 of 6 MATERLALS TO AVOID: Oxidizing agents. CONDITIONS TO AVOID: High temperatures Static discharge. HAZARDOUS: Combustion will generate; carbon monoxide, phenols. HAZARDOUS REACTIONS: Stable under normal conditions. POLYMERIZATION: Will not occur. DECOMPOSITION PRODUCTS: Nitrogen oxides (NOX), aldehydes, acrid smoke and irritating fumes. Section 11 - Toxicological Information Toxicological information on this product or its components appears in this section when such data is available. COMPONENT: 2-methoxy-1-methylethyl acetate Acute oral toxicity LD50 rat 8,532mg/kg COMPONENT: 2-methoxy-1-methylethyl acetate Acute inhalation toxicity LC50 rat 6h 23.49mg/l COMPONENT: 2-methoxy-1-methylethyl acetate Acute dermal toxicity LD50 rabbit >5,000 mg/kg COMPONENT: Cresol Acute dermal toxicity LD50 rabbit >5,000 mg/kg COMPONENT: 2-methoxy-1-methylethyl acetate TOXICITY TO REPRODUCTION Dermal teratology testing of this solvent (with less than 3% beta isomer) revealed no maternally toxic, teratogenic or fetotoxic responses in rats or rabbits exposed to concentrations of 1,000 and 2,000 mg/kg per day. COMPONENT: 2-methoxy-1-methylethyl acetate MUTAGENLELTY No significant mutagenic response was observed and the carcinogenic potential of the material is therefore considered to be low. Section 12 - Ecological Information Ecotoxicologioal information on this product or its components appear in this section when such date is available. 2-methoxy-1-methylethyl acetate Ecotoxicity effects Toxicity to fish LC50 Fathead minnow (Pimephales promelas) 86h 161 mg/l Toxicity aquatic EC50 Daphnia magna 48h Invertebrates >500mg/l Section 13 - Disposal Considerations ENVIRONMENTAL PRECAUTIONS: Prevent the material from entering drains or water courses. Page 4 of 6 Do not discharge directly to a water source. Advise Authorities if spillage has entered watercourse or sewer or has contaminated sell or vegetation. DISPOSAL Dispose in accordance with all local, state (provincial), and federal regulation. Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous residues. This material and its container must be disposed of in a safe way. Section 14 - MSDS Transport Information Transport In Accordance With Fire Service Law etc. CLASSIFICATION FOR ROAD ANG RAIL TRANSPORT: Proper shipping name RESIN SOLUTION UN-No. UN 1866 Class 3 Packing group ? CLASSIFICATION FOR SEA TRANSPORT (IMO-IMDG): Proper shipping name RESIN SOLUTION UN-No. UN 1866 Class 3 Packing group ? CLASSIFICATION FOR TRANSPORT (IATA/ICAO): Consult current IATA regulations prior to shipping by air. Transportation classifications may vary by container volume and may be influenced by regional or county variations in regulations Section 15 - Regulatory Information Label Classification and labeling have been performed according to regulations. Hazard symbol and indication of danger Xi Irritant Contains: 2-methoxy-1-methylethyl acetate R-phrase(s) R10 Flammable R36 Irritating to eyes S-phrase(s) S26 Incase of contact with eyes, rinse immediately with plenty of water and seek Medical advice. S43 Incase of fire. Use sand, dry chemical or alcohol-resistant foam. S63 This material and its container must be disposed of as hazardous waste. JAPAN. KASHIN-HOU LAW LIST (ENCS): All intentional components are listed on the inventory, are exempt, or are supplier certified. US. TOXIC SUBSTANCES CONTROL ACT (TSCA): All components of this product are in Page 5 of 6 compliance with the inventory listing requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical Substance Inventory. JAPAN FIRE SERVICE LAW Article 2, Dangerous Substance, Class 4 Second oil type, risk grade ? No Fire JAPAN WASTE DISPOSAL AND PUBLIC CLEANING LAW Japan Specific Controlled Industrial waste Section 16 - Other Information Suzhou Ruihong makes no express or implied warranties, guarantees or representations regarding the product or the information herein, including but not limited to any implied warranty of merchantability or fitness for use. Suzhou Ruihong shall not be liable for any personal injury, property or other damages of any nature, whether compensatory, consequential, exemplary, or otherwise, resulting from any publication, use or reliance upon the information herein. 正性光刻胶组成成分: 6 Dizao - 5,6 - Dihydoro - 5 -氧- 1 -萘磺酸,与 2,3,4酯,羟基二苯甲酮(6%);甲酚甲醛酚醛树脂(21%);2-甲基丙醇乙酸酯 (73%) 四甲基氢氧化胺显影液: C4H13NO 负胶漂洗液:C6H12O2 Page 6 of 6
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